Imec Furthers High-Mobility Nanowire FETs for Nodes Beyond 5nm


At today’s 2018 Symposia on VLSI Technology and Circuits, imec, the world-leading research study and development center in nanoelectronics and digital technology provided substantial development in allowing germanium nanowire pFET gadgets as an useful service to extend scaling beyond the 5nm node. In a very first paper, the proving ground revealed a thorough research study of the electrical homes of stretched germanium nanowire pFETs. A 2nd paper provides the very first presentation of vertically-stacked gate-all-around highly-strained germanium nanowire pFETs.

“With a number of scaling boosters, the industry will be able to extend FinFET technology to the 7- or even 5nm node,” states An Steegen, EVP at imec’s Semiconductor Technology and Systems department. “Beyond, the gate-all-around (GAA) architecture appears as a practical solution since it reuses most of the FinFET process steps. But one important challenge of using lateral nanowires is the significant decrease of the channel cross-section compared to conventional FinFETs. To improve the drive per footprint, several nanowires have to be stacked, but this comes with a serious penalty of increased parasitic capacitance and resistance. A solution is to replace the silicon nanowires by a high-mobility channel material such as germanium (Ge), providing the necessary current boost per footprint”, includes Steegen, “These new studies show that solution is indeed feasible, reaching the cost, area and performance requirements for nodes beyond 5nm.”

The very first research study of high-performing stretched Ge nanowire pFETs provides insight in the gadget efficiency these brand-new gadgets might provide for high-end analog and high-performance digital options. One conclusion is that devoted optimizations of essential procedure actions make these gadgets a severe competitor for the GAAtechnology The 2nd paper reports on Ge GAA FETs with single nanowires, attaining an efficiency that matches modern SiGe and Ge FinFETs. Moreover, for the very first time, stretched p-type Ge GAA FETs with stacked nanowires were shown on a 14/16 nm platform. The GAA nanowire technology looks like an appealing high-performance service for future nodes, supplied that the junctions are additional enhanced.

“These complimentary studies establish germanium GAA nanowire technology as a valid contender for the sustained scaling that will be required to fulfill the requirements for the data-driven IoT-era requiring huge computational power,” concludes Steegen.

These outcomes will exist on June 20 at the VLSI Technology Symposium, in session T8: Advanced FinFET and GAA. This research study is carried out in cooperation with imec’s essential program partners consisting of GlobalFoundries, Huawei, Intel, Micron, Qualcomm, Samsung, SK Hynix, Sony Semiconductor Solutions, TOSHIBA Memory, TSMC and Western Digital.

About imec

Imec is the world-leading research study and development center in nanoelectronics and digital innovations. The mix of our commonly well-known management in microchip technology and extensive software application and ICT know-how is exactly what makes us distinct. By leveraging our first-rate facilities and regional and worldwide environment of partners throughout a plethora of markets, we develop groundbreaking development in application domains such as health care, clever cities and movement, logistics and production, energy and education.

As a relied on partner for business, start-ups and universities we unite near to 4,000 dazzling minds from over 85 citizenships. Imec is locateded in Leuven, Belgium and has actually dispersed R&D groups at a variety of Flemish universities, in the Netherlands, Taiwan, U.S.A., China, and workplaces in India andJapan In 2017, imec’s earnings (P&L) amounted to 546 million euro. Further info on imec can be discovered at www.imec-int.com.

Source: Imec

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